IEEE International Symposium on Semiconductor Manufacturing conference proceedings
IEEE International Symposium on Semiconductor Manufacturing conference proceedings
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| Genre | |
|---|---|
| Physical Description |
1 online resource |
| Language |
English |
| Publisher |
Piscataway, N.J. :
Institute of Electrical and Electronics Engineers,
c1997-
|
| Dissertation Note | exl_impl conversion |
| Classification | |
| Dewey Classification |
621.3815/2 |
| Subjects | |
| Subseries |
2011 e-Manufacturing & Design Collaboration Symposium & International Symposium on Semiconductor Manufacturing (eMDC & ISSM) 2008 International Symposium on Semiconductor Manufacturing (ISSM) 2010 International Symposium on Semiconductor Manufacturing (ISSM) 2006 IEEE International Symposium on Semiconductor Manufacturing Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on International Conference on ASIC (ASICON) |
| Print version |
IEEE International Symposium on Semiconductor Manufacturing conference proceedings. 1523-553X |
| Publish date |
1997- |
| Publication Frequency |
Annual, 1999- |
| Source of Acquisition |
Curran Associates, Inc., 57 Morehouse Lane, Red Hook, NY 12571 |
| Notes |
Sponsoring organizations: Ultra Clean Society, Semiconductor Equipment and Materials International, IEEE Electron Devices Society, and the Components, Packaging and Manufacturing Technology Society, 1997- |
| Get full text | |